Technics |
Available |
Aperture |
Material |
UV lithography |
4μm, 10μm, 10.8μm, 11.7μm, 13μm, 15μm,
17μm, 20μm, 40μm |
up to 20mm × 20mm |
Fused silica, monocrystalline silicon |
EBL lithography |
period and filing factor of your choice <4μm |
typical but not limited
to 5mm × 5mm |
Fused silica (substrate up to 4“), monocrystalline silicon |
Holographic lithography |
250 - 400 nm |
typical but not limited
to 10mm × 10mm |
Fused silica, monocrystalline silicon |
*Thin metal coating enhancing reflectance is available.
|
You know what light distribution you need but are not sure how to obtain it.
Just contact us!
We will simulate and realize the custom pattern for your task. |
|
References
K. Jarašiūnas, R. Aleksiejūnas, T. Malinauskas, V. Gudelis, T. Tamulevičius, S. Tamulevičius, A. Guobienė, A. Usikov, V. Dmitriev, H. J. Gerritsen, Implementation of diffractive optical element in four-wave mixing scheme for ex-situ evaluation of HVPE-grown GaN layers // Review of Scientific Instruments 78 033901 (2007) https://doi.org/10.1063/1.2712788
T. Tamulevičius, I. Gražulevičiūtė, A. Jurkevičiūtė, S. Tamulevičius,The Calculation, Fabrication and Verification of Diffraction Grating Based on Laser Beam Splitters Employing a White Light Scatterometry Technique // Optics and Lasers in Engineering 51 (10) 1185-1191 (2013) https://doi.org/10.1016/j.optlaseng.2013.04.001
L. Stankevičius, T. Tamulevičius, A. Žutautas, M. Juodėnas, K. Juškevičius, R. Drazdys, S. Tamulevičius, Diffraction efficiency optimization of multilayer dielectric mirror-based gratings for 1030 nm femtosecond lasers // Optics and Laser Technology 126 106071, 1-8 (2020) https://doi.org/10.1016/j.optlastec.2020.106071
Žutautas, A.; Tamulevičius, S.; Tamulevičius, T. From design to realization of high diffraction efficiency Littrow configuration diffraction gratings based on multilayer dielectric mirrors patterned with electron beam lithography // Optics and laser technology 169 110086, 1-7 (2023) http://doi.org/10.1016/j.optlastec.2023.110086.